ꥹ򤱤ƥ졼åԤʤ϶

졼åˤ϶ξ ꥹԡʤɡ

ޥ졼

졼å˻Ȥޥ졼Ȥϡ

졼åǻѤ륨ޥ졼Excimer LaserˤȤϴϥʤɤκ祬Ѥƥ졼ȯ֤Ǥ롣ϹѤȤѤƤǶǤϥ졼åʤɤλ϶ѤˤƤѤƤ롣
ϥ르󡢥ץȥ󡢥Υ󤬡ϥϥեǡǤ̤˻Ѥ롣祬ǤΥѥ륹Ťˤä嵯ִҤȥϥ󸶻ҤˤäƷ륨ޤ͸ˤäƥѥ륹ȯ롣
ɽŪʥޥ졼ȯĹϰʲΤȤǤ롣
ArF - 193 nm
KrF - 248 nm
XeCl - 308 nm
XeF - 353 nm
ѤӤȤƤϵùȾƳ¤ˤեȥ꥽ե롣ޤˡΤҤȤĤǤPLDˡˤŪѤƤ롣
϶Ѥˤơޥ졼ĹûΰʬɬפʤΤ˽뤳ȤǽǤ롣졼ȤäƤǮȯΤǤϤʤ׷ȤʤǮ˼夤ȿ˰ƶͿ뤳Ȥʤäƥޥ졼Ȥä졼åѤˤߤۤȤȼ鷺ϲᤤȤħ롣ꥫǤ1995ǯFDAƹʰʶɡˤˤäơܤǤ2000ǯ1˸ʡʸϫƯʡˤˤäƤλѤǧĤƤ롣ޤޥ졼ȯΤʤȤǧƤ롣


ƮʤɤƤλϲ ԥ졼å

쥢Ȥϡ

졼åΥ˥å3ޥ졼

ǽ⤤ޥ졼ƳƤ롣

ȿǮʤ䤱ɡˤۤȤɵ̵ˡ
ΤڳڽǤȤħä
üʹ⥨ͥ륮Υ졼ޥ졼Ǥ
졼åǤϤΥޥ졼Ȥä
뤳Ȥˤꡢ
Υ֤Ѳޤ
ޥ졼ϥԥ塼椵Ƥ뤿ᡢ
ޥ᡼ȥʣޥ᡼ȥϣʬΣߥ᡼ȥ
ñ̤Ȥ⤤٤dzη뤳ȤǤޤ
ޥ졼ˤĤμबޤΤǡ
ǽļӤ˭٤ʤΤƳƤ뤳ȤݥȤǤ